Webinars
![](https://i.ytimg.com/vi/m88R243xmBQ/maxresdefault.jpg)
Comparison of CHS to other silicon precursors
The unique molecular structure of cyclohexasilane is what contributes to its lower Si-Si and Si-H bond energies as compared to other silicon precursors. These lower bond strengths translate directly to faster deposition rates of higher purity films at lower temperatures.